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BioNanoFluidic MEMS

Microsystems 19, MEMS Reference Shelf

Erschienen am 14.12.2007, 1. Auflage 2008
160,49 €
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Bibliografische Daten
ISBN/EAN: 9780387462813
Sprache: Englisch
Umfang: x, 295 S., 100 s/w Illustr., 295 p. 100 illus.
Einband: gebundenes Buch

Beschreibung

InhaltsangabePreface.- Nanoelectronics: Retrospect and Prospect.- Synthesis of oxide nanostructures.- Nanolithography.- Nano/Microfabrication methods for sensors and NEMS/MEMS.- Micro and nanomanufacturing via molding.- Temperature measurement of microdevices using thermoreflectance and raman thermometry.- Stereolithography and rapid prototyping.- Engineered nanopores.- Engineering biomaterial interfaces through micro and nano-patterning.- Biosensors micro and nano integration.

Produktsicherheitsverordnung

Hersteller:
Springer Verlag GmbH
juergen.hartmann@springer.com
Tiergartenstr. 17
DE 69121 Heidelberg

Autorenportrait

InhaltsangabeNanotechnology: Retrospect and Prospect.- Synthesis of Oxide Nanostructures.- Nanolithography.- Nano/Microfabrication Methods for Sensors and NEMS/MEMS.- Micro- and Nanomanufacturing via Molding.- Temperature Measurement of Microdevices using Thermoreflectance and Raman Thermometry.- Stereolithography and Rapid Prototyping.- Case Studies in Chemical Sensor Development.- Engineered Nanopores.- Engineering Biomaterial Interfaces Through Micro and Nano-Patterning.- Biosensors Micro and Nano Integration.

Inhalt

Preface.- Nanoelectronics: Retrospect and Prospect.- Synthesis of oxide nanostructures.- Nanolithography.- Nano/Microfabrication methods for sensors and NEMS/MEMS.- Micro and nanomanufacturing via molding.- Temperature measurement of microdevices using thermoreflectance and raman thermometry.- Stereolithography and rapid prototyping.- Engineered nanopores.- Engineering biomaterial interfaces through micro and nano-patterning.- Biosensors micro and nano integration.

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